HCDS series chemical supply system, adopting modular design, customization, flexible configuration, online proportioning system with real-time, high precision, which can realize closed loop control parameters, meet the wet process equipment in the process of semiconductor manufacturing chemicals such as cleaning fluid supply demand, convenient operation and maintenance, high reliability, safety and low maintenance cost, flexible configuration, etc.
Real-time, high precision ratio of online system
Closed-loop control parameters
High reliability, safety and low maintenance cost
Flexible configuration