HSDS series grinding fluid supply system adopts modular design, customization, flexible configuration, online proportioning system with real-time, high precision, which can realize parameters such as concentration, flow, pressure closed loop control, meet the semiconductor manufacturing process of wet process equipment such as grinding fluid supply demand, convenient operation and maintenance, high reliability, safety and low maintenance cost, flexible configuration, etc.
Real-time, high precision ratio of online system
Closed-loop control parameters
High reliability, safety and low maintenance cost
Flexible configuration